Formation of Vertical Epitaxial Si Nanowires on Si Using Self-organized Nanohole Array of Anodic Porous Alumina Template
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چکیده
منابع مشابه
Porous anodic alumina on galvanically grown PtSi layer for application in template-assisted Si nanowire growth
We report on the fabrication and morphology/structural characterization of a porous anodic alumina (PAA)/PtSi nano-template for use as matrix in template-assisted Si nanowire growth on a Si substrate. The PtSi layer was formed by electroless deposition from an aqueous solution containing the metal salt and HF, while the PAA membrane by anodizing an Al film deposited on the PtSi layer. The morph...
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ژورنال
عنوان ژورنال: Journal of the Japan Society for Precision Engineering
سال: 2014
ISSN: 0912-0289,1882-675X
DOI: 10.2493/jjspe.80.439